4processed

Form 4 — Insider Transaction

AXCELIS TECHNOLOGIES INC(ACLS)

Filing Date

May 15, 2026

Accepted

May 15, 2026

Accession No.

0001715912-26-000003

CIK

0001113232

Insider Transactions

InsiderTitleTypeSharesPriceValueOwned AfterSecurityDate
Evans EileenEVP, General Counsel and Sec'yOther3.9K$029.2KCommon StockMay 15, 2026
Evans EileenEVP, General Counsel and Sec'yOther3.9K$033.1KCommon StockMay 15, 2026
Evans EileenEVP, General Counsel and Sec'yOther867$155.1832.2KCommon StockMay 15, 2026